Nano-Fabrication of Nano-Crystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition

Microwave Plasma Assisted Chemical Vapor Deposition of Diamond

Diamond crystal S and p01 ycrystal l i ne diamond fi lms have been depos i e y t h e microwave plasma ass i s t ed C V D method from C H / H mixtures. The i n: :oncentration of methane, the pressure, the temperatu$e, 'the to ta l flow ra t e and the microwave power were varied in large ranges. The morphology of the deposits were s tudied by op t i ca l and scanning e l ec t ron microscopy and t...

Modeling of Plasma-Enhanced Chemical Vapor Deposition of Nano-crystalline Silicon Carbide Films Using Neural Network

s The infrared absorption peak shift of PECVD nano-crystalline β-SiC films have been modeled using neural network which was trained using the error back-propagation algorithm. This ANN model can be built with process input– output experimental data. The PECVD process was characterized by modeling peak shifts of Fourier transform infrared (FTIR) spectroscopy as a function of varying seven contro...

Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H2/N2 plasma enhanced chemical vapor deposition

Nano-crystalline Diamond Films for X-ray Lithography Mask

One Step Rapid Synthesis of Nano-Crystalline ZnO by Microwave-Assisted Solution Combustion Method

In this study nano-crystalline ZnO particles were synthesized by microwave-assisted solution combustion method. Zinc nitrate and urea were used as oxidizer and fuel, respectively. The effect of fuel to oxidizer (F/O) ratio on ZnO powder properties was investigated by using different urea/nitrate ratios. X-ray diffractometer, scanning electron microscopy and fourier transform infra-red were used...